https://ogma.newcastle.edu.au/vital/access/ /manager/Index en-au 5 A 3-DOF SOI MEMS ultrasonic energy harvester for implanted devices https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:21717 Wed 11 Apr 2018 13:37:27 AEST ]]> Control of a MEMS nanopositioner for atomic force microscopy https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:19482 Sat 24 Mar 2018 08:02:19 AEDT ]]> A 2-DOF electrostatically actuated MEMS nanopositioner for on-chip AFM https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:23241 Sat 24 Mar 2018 07:10:38 AEDT ]]>